English to French Tech/Engineering Patents charged particle beam, astigmatism, optical axis, transmission electron microscope (TEM)

five-fold astigmatism is produced from six-fold astigmatisms which are produced, respectively, between the multipole elements 11 and 12 and between the multipole elements 12 and 13.

n a case where the five-fold astigmatism (or, axial deviation-induced aberration) on the sample surface 18 has vanished, the electron beam 20 passes on the central axes (rotationally symmetric axes) of the multipole elements 11-13.


The controller 37 checks the five-fold astigmatism appearing on the sample surface 18 during the translational motions . When the five-fold astigmatism vanishes, the translational motions are stopped.