Glossary entry (derived from question below)
English term or phrase:
jet port forming member
French translation:
un élément formant un orifice gicleur
Added to glossary by
FX Fraipont (X)
Jul 17, 2012 12:35
11 yrs ago
English term
jet port forming member
English to French
Tech/Engineering
Law: Patents, Trademarks, Copyright
dispositif
An apparatus for processing the outer peripheral part of a substrate, wherein said reactive gas supplying means includes a jet port forming member for forming said jet port and said jet port forming member is composed of a light transmissive material.
Proposed translations
(French)
5 +1 | un élément formant un orifice gicleur | FX Fraipont (X) |
Change log
Jul 18, 2012 12:55: FX Fraipont (X) Created KOG entry
Proposed translations
+1
5 hrs
Selected
un élément formant un orifice gicleur
where's the ink?
"TECHNICAL FIELD
This invention relates to a method for removing unnecessary matters such as organic films coated on the outer peripheral part of a substrate such as a semiconductor wafer, a liquid crystal display substrate or the like.
...
17. An apparatus for processing the outer peripheral part of a substrate according to claim 3, wherein said reactive gas supplier includes a jet port forming member for forming said jet port, and said jet port forming member is composed of a light transmissive material. "
http://www.freepatentsonline.com/y2008/0073324.html
"TECHNICAL FIELD
This invention relates to a method for removing unnecessary matters such as organic films coated on the outer peripheral part of a substrate such as a semiconductor wafer, a liquid crystal display substrate or the like.
...
17. An apparatus for processing the outer peripheral part of a substrate according to claim 3, wherein said reactive gas supplier includes a jet port forming member for forming said jet port, and said jet port forming member is composed of a light transmissive material. "
http://www.freepatentsonline.com/y2008/0073324.html
4 KudoZ points awarded for this answer.
Comment: "merci!"
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